John Morris

Overview

Ozone is an environmentally friendly alternative to many chemical processes. It has a high redox potential, can be generated at the point of use and is easily converted back to oxygen. Typical semiconductor ozone applications include TEOS/Ozone CVD, Ta2O5 CVD, photoresist strip, wafer cleaning, contaminant removal, surface conditioning, oxide growth, and ALD. Ozone is also ideally suited for use in pharmaceutical and water processing applications including cleaning, sterilisation and disinfection, as well as Clean-In-Place (CIP).

The SEMOZON AX8407 is the next generation in the MKS family of compact, high concentration, ultra-clean ozone generators. Through design enhancements, the SEMOZON AX8407 extends the capability of the patented MKS cell technology and production-proven design of the ASTeX® AX8000 series generators to provide the highest performance for it's size.

The generator converts pure oxygen into ozone through silent electrical discharge and achieves the highest output concentration levels available. The AX8407 is the highest purity ozone generator on the market. It requires only minute levels of dopant nitrogen gas, far below the levels required for competitive ozone generators. As a result, the ozone is ultra-clean and the presence of contaminants, eg, NOx compounds, is extremely low.
Features

Highest Ozone Concentration and Flow
• Uniquely suited to high flow rate processes
• Concentrations up to 18.5wt%
• Flow rates from 10 to 40 slm
• Patented, welded cells with advanced cooling

Ultra Clean Ozone
• Extremely low levels of dopant gas reduce contaminants
• Lowest levels of NOx compounds

Clean, Safe Alternative to Conventional Chemical Processing
• High redox potential
• Can be generated at the point of use
• Green chemical, easily converted back to oxygen

Low Cost of Ownership
• No consumables, no preventive maintenance
• No chemical disposal costs

CE, ETL and CSA compliant