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RPG-50 DC 5kW Plasma Generator

Part Number: RPG-50Product Details

Overview

Pulsed DC Generator 5 kilowatt High Frequency Asymmetric Bipolar Pulsed DC Power for Plasma Applications

The RPG-50 is a 5000W Asymetric Bipolar Pulsed DC generator which enables the deposition of a wide variety of low defect di-electric insulating films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN.

214623_overview.pdf

Features

• For Reactive* PVD, CVD Bias and Hard Coating
• Programmable Frequency, Duty Cycle
* U.S. Installations: This power supply may not be used for depositing electrically insulating materials in a reactive sputtering system for the purpose of preventing arcs from occurring in the first place as claimed in US Patent Nos. 5718813 and 6001224

Specifications

Part Number: RPG-50
Cooling System Forced air; front panel & right side in, rear panel out
DC Linearity/Accuracy Independent of Regulation Mode - ±0.1%: 10-100% of rated output
In Watts Mode - ±0.25%: 1-10% of rated output
Duty Cycle Programmable from 0 to 40% (Reverse Bias)
EMC Compliance EN50081-2: 1992
EN50082-2: 1995
Environmental Conditions Operating Temperature - 5°C to 40°C
Relative Humidity (operational) - 80% RH maximum at up to 31°C (decreasing linearly to 50% RH maximum at 40°C)
Maximum Operating Altitude - +3500 meters above sea level
Frequency Programmable from 25 to 125kHz or 50 to 250kHZ
Front Panels Fully Functional - Provides complete control and monitoring from the master unit
Remote - Provides complete remote control and monitoring functions
Blank - Three LED's indicate AC On, DC On, and Fault
Input Power Factor >0.7 at maximum power output
Line Frequency 50 and 60 Hz, ±2%
Line Regulation ±0.1% for ±10% line voltage change
±2% line frequency change
Line Voltage & Current, AC Input (3-phase)/Nom/Max 200-208V (±10%)/19A/25A
400V (±10%)/11A/14A
Line-to-Output Efficiency >85%
Load Regulation ±0.1% for a 4:1 load impedence range
Output Control Modes Ramping, Run Time, Joule, Sequence, Constant Run
Power & Current Limits Power - 5.25kW for rated 5kW output; proportional at other power levels
Current - 10.5A
Power Output 5kW
Rack Mounting EIA (Standard)
Universal JIS Bracket (optional)
Regulation Modes Volts, Amps, Watts
Safety Compliance NRTL UL 3111-1 (1994)
CAN/CSA C22.2 No. 1010.1-92
EN61010-1:1993/A2:1995
Shock Resistance (certified to meet) IEC 68-2-9 test for bump
IEC 68-2-6 test for vibration
IEC 68-2-23 test for bump
Standard Connectors 9-pin Type D with RS 232/422, Profibus®, ENI Protocol, DNET
Digital Interface - Output PL259, UHF female
AC Input 5 terminal barrier strip
Interlock 2 terminal PC header
Weight 25kg (55 lbs)
Dimensions (H × W × D, including rack mount & handles): 132.5mm × 480mm × 631mm (5.22" × 18.9" × 24.8")

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