Pulsed DC Generator 5 kilowatt High Frequency Asymmetric Bipolar Pulsed DC Power for Plasma Applications
The RPG-50 is a 5000W Asymetric Bipolar Pulsed DC generator which enables the deposition of a wide variety of low defect di-electric insulating films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN.
• For Reactive* PVD, CVD Bias and Hard Coating
• Programmable Frequency, Duty Cycle
* U.S. Installations: This power supply may not be used for depositing electrically insulating materials in a reactive sputtering system for the purpose of preventing arcs from occurring in the first place as claimed in US Patent Nos. 5718813 and 6001224