John Morris

Overview

Based on the MKS Gas Box Rate-of-Rise In Situ Flow Verifier (GBROR), the PFTS1A is a robust, easy-to-use precision flow measurement system. A wheeled, portable caddy with integral tilt stand contains the electronic control unit, one or two calibrated GBROR gas sticks, and a power supply/readout unit for the device under test. Each gas stick contains a specially designed MKS Baratron® capacitance manometer whose accuracy and stability enables this ROR measurement technique to deliver better than 1% of Reading accuracy. All components of the gas stick module are tested and calibrated as a unit to provide maximum performance. In the calibration process, each stick receives a multipoint calibration using several precision flow standards thereby ensuring accuracy across the entire range of the unit. The PFTS1A may be used as a bench test instrument or it may be used on the production floor for in situ testing.

The unit requires an external vacuum pump or the optional mobile cart for operation. Also required are two gas sources: a well regulated supply of test gas and clean dry air or nitrogen for valve actuation.

While the wetted materials of the PFTS1A are compatible with a wide variety of gases, the customer must take responsibility for the safe and proper handling of toxic or reactive gases in accordance with the customer's safety policies and local statutes.
Features

• Quickly verifies mass flow controller accuracy and repeatability to within 1% of Reading
• NIST traceable pressure rate-of-rise technique provides true flow rates, independent of gas species
• May be used for bench or in situ testing
• Wetted materials are compatible with a wide variety of gases
- 2 sccm to 2slm
- 100 sccm to 20 slm
- 2 sccm to 20 slm
• Unit is packaged in a convenient wheeled caddy for portability
• CE compliant - meets requirements for European Union