GHW Series 13.56 MHz 1.2kW High-Reliability RF Plasma Generator, 208 VAC
Part Number: GHW12AProduct Details
Overview
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
The GHW RF plasma generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
Features
Superior RF Stability
• Frequency stability equals 13.56 MHz ±0.005%
• Regulation tolerance of ±1.5% of set point within power range
Excellent Reliability
• Microprocessor-based
• Automatic load mismatch protection
• Unlimited load impedance range
Specifications
| Part Number: |
GHW12A |
| Cooling System |
Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at +5°C to +35°C. Connections provided to accept 1/4" male (NPT) pipe thread. |
| Dimensions (H × W × D, excluding handles & connectors) |
89mm × 483mm rackmount × 508mm (3.5" × 19" × 20.0") |
| Dynamic Power Range |
10-1250W |
| EMC Compliance |
EN50081-2: 1992
EN50082-2: 1995 |
| Frequency/Stability |
13.56 MHz ± 0.005% |
| Harmonic Output & Distortion |
< -40 dBc |
| Load Impedance Range |
Unlimited |
| Load Mismatch Protection |
Automatic; forward power limits typically 0.25 ms after reverse power reaches a pre-programmed level <=16% of rated power |
| Power Readout |
Digital readout displays frequency and forward, reflected and load power |
| Primary AC Power Source |
200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE
380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE |
| Rack Mounting |
EIA (Standard) 19-inch adapters supplied |
| Rated Power Output (into 50 ohm load) |
1250W |
| Regulation Tolerance |
> 125W - ±1.5% SP
< 125W - ±3.0W
< 500W - ±10.0W |
| Remote Interface Connectors |
Standard - RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available |
| RF Output Connector |
Type N |
| RF Stability/Spurious Output |
Unconditionally stable for any load within operational limits < -45 dBc |
| Safety Compliance |
NRTL Listed: UL3111-1 (1994)
CAN/CSA C22.2 No. 1010.1-92
EN61010-1: 1993; A2: 1995 |
| Weight |
14.8kg (32.5 lbs) |