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MultiGas™ Purity Real-Time Trace Impurity Detection

Part Number: MultiGas PurityProduct Details


The MultiGas Purity Analyser is an FTIR based analyser capable of ppb contaminant detection in high purity bulk process gases. Bulk gas production quality has been improved with the MultiGas Purity Analyser for such gases as NH3, NF3, and hydrogen.

The MultiGas Purity Analyser is composed of a 2102 Process FTIR Spectrometer, high-optical-throughput sampling cell, and applications-specific analysis software. These integrated components, along with automated bake-out functionality, provide unmatched precision and accuracy for bulk gas contaminant monitoring.

• Real-time, on-line purity analysis of bulk process gas
• ppb level impurity detection in bulk process gases such as NF3, NH3 and H2
• Constructed for corrosive high purity gases
- 316 SS welded sample lines and gas cell construction
- Heated optical path eliminates moisture and atmospheric contaminants
- Automated bake-out procedure
• High resolution analyser deconvolves overlapping spectra
- Enables speciation of impurities in the bulk gas
• Specialised zeroing and self-calibration software


Continuous monitoring of trace contaminants in high purity bulk gases in production environments, including:
• H2O, CO, CO2, N2O and CH4 in NH3
• H2O, CO, CO2, N2O and HF in NF3
• H2O, CO, CO2, HF, HCI, NH3, CH2CI2 and CHCI3 in H2
• H2O, CO, CO2, CH4, and NH3 in N2O


Part Number: MultiGas Purity
Communications National Instruments GPIB
Computer Requirements Desktop or notebook Intel Pentium® PC under Microsoft® Windows® 95/98/NT/2000/Me and XGA display (1024 × 768)
Recommended - Intel Pentium III, 850 MHz, Microsoft Windows 2000, 256 MB
Minimum - Intel Pentium, 200 MHz, Microsoft Windows 95, 64 MB
Construction Welded 316 stainless steel
Detector LN2-cooled MCT; TE-cooled MCT; Stirling-cooled MCT
Dimensions (W × H × D) 17.5" × 12.5" × 25.5"
Fittings ¼" VCR®
FTIR 2102 Proces FTIR
Gases and Vapors Measurable Most molecules except for N2, H2, and O2
Infrared Source Silicon Carbide @ 120°C
Installation 19" rack mount chassis
Measurement Technique FTIR Spectrometry
Mirrors Nickel plated aluminum substrate, with rugged gold coating
Optics Purge Flow 4 L/min of purified ultra pure N2
Output RS232/422/485, analog output
Power 120 or 240 VAC, 50/60Hz, 6 amps
Pressure Transducer MKS Baratron®
Purge Connection ¼" VCR®
Purge Pressure 20 psig (1.5 bar) max.
Ranges Full scale concentration setting between 10ppb and 10% full scale
Reference Laser Helium Neon (15798.2/cm)
Sample Flow 0.2-10 L/min
Sample Pressure 0.01-8 atm (calibration pressure dependant)
Sample Temperature Ambient to 60°C (calibration temperature dependant)
Scan Speed 2 scans/sec @ 0.5/cm
Scan Time 1-300 sec
Spectral Resolution 0.5/cm-128/cm
Spectrometer Purge Flow 4 L/min of purified ultra pure N2
Tubing Heated ¼" stainless steel
Weight 57kg (125 lbs.)
Windows CaF2, KBr, ZnSe (others available)

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