LIQUOZON® 100 Ozonated Water Delivery Subsystem
Part Number: LIQUOZON® 100Product Details
The LIQUOZON® subsystem is designed to provide a full range of dissolved ozone - from 5 to 90 ppm, the highest concentration of dissolved ozone available on the market. Closed-loop control coupled with an intelligent electrical interface allows delivery of ozonated water at variable flow rates to multiple tools. High purity, ozone-resistant materials and unique doping technique ensure ultra clean ozonated water delivery for high purity semiconductor and flat panel applications.
The LIQUOZON® system features the field-proven, patented SEMOZON® ozone generation technology. The system includes monitoring, control (including closed-loop control of dissolved ozone concentration) and ozone destruct modules with all necessary plumbing. LIQUOZON® systems are enclosed in a vented rack, interlocked for safety and are S2-93 and CE compliant.
The MKS, ASTeX® Products LIQUOZON® family of high performance, ultra clean dissolved ozone delivery systems provides high purity, disolved ozone in concentrations ranging from 5 to 90 ppm at flows from 5 to 60 liters per minute. Typical dissolved ozone applications include wet wafer cleaning, photoresist strip, contaminant removal, surface conditioning and oxide growth.
Ozone is an environmentally friendly alternative to many process chemicals in the semiconductor industry. It has a high redox potential, can be generated at the point-of-use and is easily converted back to oxygen. Cost of purchase, storage and disposal of many chemicals can thus be reduced considerably.
Process Performance and Repeatability
• Highest dissolved ozone concentration, up to 90 ppm
• Maximum ozonated water flow of 60 lpm
• Fast response to adjustments in flow and concentration
• Constant ozone concentration and operating pressure at varying flow rates
• Ultra clean for semiconductor processing applications
Clean, Safe Alternative to Conventional Chemical Processing
• High redox potential
• Can be generated at point-of-use
• Green chemical - easily converted back to oxygen
• MTBF > 20000 hours
Low Cost of Ownership
• Reduced chemical consumption and disposal cost
• Supports single or multiple proces tools for maximum efficiency and minimum footprint
• Industry leading ozone generating technology
• CE Mark and S2-93 compliant
The LIQUOZON® ozonated water delivery systems are available in two models, the LIQUOZON 100 for flows up to 30 liters per minute and the LIQUOZON XF for extended flow range operation of up to 60 liters per minute. Both the 100 and the XF are compact with a small footprint, designed to deliver ozonated water with a full range of dissolved ozone concentrations from 5 to 90 ppm. This is the highest concentration of dissolved ozone available on the market. Closed-loop control ensures delivery of ozonated water at a stable ozone concentration, even at variable flow rates. The exceptionally wide flow range (1 to 60 l/min) accommodates a broad spectrum of process requirements. An intelligent electrical interface allows connection to single or multiple tools. High-quality, ozone resistant materials and a unique doping technique ensure ultra clean ozonated water delivery for high-purity semiconductor and flat panel applications.
The LIQUOZON systems feature the field-proven SEMOZON® ozone generation technology, proprietary MKS-designed contactors for unsurpassed dissolving efficiency of ozone gas in water, state-of-the-art controls and an ozone destruct module for safe re-conversion of residual ozone gas to oxygen. The LIQUOZON systems are enclosed in a vented rack and are S2-93 and CE compliant.
Together with the optional accessory FLOW CONTROL BOX, the LIQUOZON system can even feed multiple points-of-use at different concentrations and flows simultaneously.This alows exceptional flexibility and scope from a single LIQUOZON system.
|Available Operating Pressure
||Constant setpoint configurable from 1.0 to 2.5 bargauge (14.5-36 psig), closed-loop control
||SEMI S2-93, CE mark
||RS232, discrete communication
||800mm × 800mm × 190mm (32" × 32" × 75")
||5-15 slm (typically 10 slm)
||Typicaly 0.2 slm
|Flow Rate (at 2.5 bar operating pressure and 20°C)
||45 ppm @ 20 l/min
30 ppm @ 30 l/min
||3.8-7.6 bargauge (5-10psig)
||4.2-7.6 bargauge (60-100 psig)
|Maximum Total UPW Flow
|Nominal Operating Pressure
||2.5 bargauge (36psig)
|Ozone Concentration @ UPW
||65 ppm @ 10 l/min
||3 phase, 208 VAC ± 10% (4-wire), 10 A (max), 50/60 Hz
||2.0-5.0 bar gauge(29-73 psig)
|Pressure, at nominal operating pressure
||At nominal operating pressure - (2.5 bargauge) : 3.5-5.0 bargauge (51-73 psi)
||Resistivity >18 Mohm cm
Conductivity > 0.05 µS/cm
||Carbon Dioxide CO2, grade 4.5 or better
||Grade 2.5 or better
||Conductivity - > 50 µS/cm (filtered tap water)
||> 6 l/min, typically 7 l/min
|Specified Maximum Dissolved
||90 ppm @ 5 l/min
||535kg (178 lbs.)