Chat to our customer service

Enquire Now

Complete your details below and we will be in touch as soon as possible.

*
*
*
*

Brand Info

View MKS website

Model 090.2 SEMOZON® Ozone Generator

Part Number: 090.2Product Details

Overview

The SEMOZON® 090.2 is a compact, high concentration, ultra-clean ozone generator uniquely suited for use in semiconductor fabrication. Ozone is an environmentally friendly alternative to many chemical processes. It has a high redox potential, can be generated at the point of use and is easily converted back to oxygen. Typical ozone applications include TEOS/Ozone CVD, Ta2O5 CVD, photoresist strip, wafer cleaning, contaminant removal and surface conditioning, and oxide growth.

The generator converts pure oxygen into ozone through silent electrical discharge and achieves highest output concentration levels. High purity materials such as the electro-polished stainless steel plumbing and an extremely low requirement for dopant gas ensure high purity ozone. The generator may be controlled remotely with connections for on/off, operation, output power and alarms. Together with the optionally available Ozone Control Units, the SEMOZON® 090.2 generator can be combined into a fully independent closed loop controlled ozone subsystem.

Features

Proven Performance and Reliability
• Industry leading ozone generating technology
• High ozone concentration and flow for high rate processes
• Ultra clean for semiconductor processing applications
• Safety interlocked
• CE Mark, S2 0200

Clean, Safe Alternative to Conventional Chemical Processing
• High redox potential
• Can be generated at point of use
• Green chemical-easily converted back to oxygen

Specifications

Part Number: 090.2
Ambient Temperature Range 5°C-40°C (41°F-104°F)
Ambient Temperature Range 5°C-40°C (41°F-104 °F)
Compliance CE mark, S2 0200 with optional exhaust add-on
Compliance CE
Connected Load 115VA
Connected Load total approximately 2.8 kVA
Control Interface Discrete or RS232 or Profibus (dependant on version)
Control Interface Remote Operation (front panel control with optional hardware)
Output Power controlled by 0-5 V input sign
Controllable Ozone Output Accomodates output of SEMOZON ozone generator models 090 and 140
Cooling Water Quality - Filtered tap water (50 µm filter)
Conductivity - > 50 µS/cm (Resistivity < 20 kW cm)
Temperature - nominal 20°C (68°F)
Flow - 6 l/min recommended (1.6 gal/min)
Cooling Water Connections ½" NPT male
Dimensions (L × W × H) T1 - 800mm × 810mm × 1370mm (31.5" × 31.9" × 53.9")
T2 - 800mm × 810mm × 1850mm (31.5" × 31.9" × 72.8")
Dimensions (L × W × H) 500mm × 500mm × 220mm (19.7" × 19.7" × 8.7")
Dimensions (L × W × H) 603mm × 560mm × 285 mm (23.7" × 22" × 11.2")
Equipment Capability T1 - 1 SEMOZON 090.2 ozone generator; 1 OCU
T2 - 2 SEMOZON 090.2 ozone generator; 2 OCU
Feed Gas Oxygen O2 - Grade 2.5 or better, dew point < -40°C
Nitrogen N2 (dopant gas) - If the oxygen quality is better than grade 4.5, Nitrogen (of grade 5 or better) must beaded as a dopant gas in a concentration of 10-50 ppm
Gas Connections ½" VCR® male
Gas Flow Range 2.5-15 slm
Gas Flow Range 2.5-10slm, up to 20 slm on request
N2 Connection ¼" VCR
Nominal Ozone Output 90 g/h at 150 g/m³ ozone and 10 slm - The actual concentration depends on the gas flow and the power setting (see performance diagram, below)
O2 Connection ½" VCR
O2 Inlet Pressure, High Pressure Version (HP) Nominal - 2.5 bargauge (36 psigauge)
Operating Range - 1.3-3.2 bargauge (19-46 psigauge)
O2 Inlet Pressure, Low Pressure Version (LP) Nominal - 0.5 bargauge (7.3 psigauge)
Operating Range - 0.1-1.5 bargauge (1.5-2.2 psigauge)
O3 Connection ¼" Swagelok with ½" Flaretek Double Containment
Power Supply 3/PE ~ 208 V, 50/60 Hz, ±10% or
1/N/PE ~ 230 V, 50/60 Hz ±10%
Power Supply 2.6 kVA connected load
3 phase, 208 VAC, 50/60 Hz or 1 phase, 230 VAC, 50/60 Hz
Power Supply 1/N/PE ~ 90-264 V, 50/60 Hz, or 2/PE ~ 90-264 V, 50/60 Hz
Pressure Range Dependant upon SEMOZON ozone generator model (0.5-2.5 barg)
Weight 57kg (126 lbs)
Weight 20-24kg (44-53 lbs.)
Weight (with generator and OCU) T1 - 200 kg (440 lbs)
T2 - 400kg (880 lbs)

Related Items

  • LIQUOZON® Smart Ozonated Water Delivery System
  • LIQUOZON® Single Ozonated Water Delivery System, 5.6 slm typical flow rate
  • LIQUOZON® Single Ozonated Water Delivery System, 2.8 slm typical flow rate
  • O3MEGA™ AX8561 Integrated Ozone Delivery System
  • SEMOZON® AX8400 Series Ozone Generators
  • AX8407 SEMOZON® High Concentration Ozone Generator
  • AX8407C Compact SEMOZON® High Concentration Ozone Generator
  • AX8555 SEMOZON® Stand-Alone Ozone Delivery System for Advanced Processes
  • AX8550 SEMOZON® Stand-Alone Ozone Delivery System for High Flow Processes
  • AX8560 SEMOZON® Compact, Integrated Ozone Delivery Subsystem
  • Flow Control Box Ozonated Water Flow and Concentration Control Unit
  • LIQUOZON® Single Ozonated Water Delivery System, 1.4 slm typical flow rate
  • LIQUOZON® XF Ozonated Water Delivery Subsystem
  • LIQUOZON® 100 Ozonated Water Delivery Subsystem
  • Ozone Gas Destruct (OVS) - Catalytic Converter for Safe Transformation Ozone Gas