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Plasma Systems

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  • Showing 1 - 11 of 11 items
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ASTeX AX3060 SmartMatch® Microwave Matching Unit - MKS ASTeX AX3060 SmartMatch® Microwave Matching Unit
Part Number: AX3060
ASTeX AX7610 Chemical Downstream Plasma Source - MKS ASTeX AX7610 Chemical Downstream Plasma Source
Part Number: AX7610
ASTRON®e Type AX7680 (rated to 4.0 slm flow) - MKS ASTRON®e Type AX7680 (rated to 4.0 slm flow)
Part Number: AX7680
ASTRON®ex AX7685 (rated to 6.0 slm flow) - MKS ASTRON®ex AX7685 (rated to 6.0 slm flow)
Part Number: AX7685
ASTRON®hf-s AX7645 Remote Plasma Source (rated to 15.0 slm flow) - MKS ASTRON®hf-s AX7645 Remote Plasma Source (rated to 15.0 slm flow)
Part Number: AX7645
ASTRON®i Type AX7670 Remote Plasma Source - MKS ASTRON®i Type AX7670 Remote Plasma Source
Part Number: AX7670
AX2600 Integrated Plasma System - MKS AX2600 Integrated Plasma System
Part Number: AX2600
R*evolution® Integrated Remote Plasma Source for On-Wafer Processing - MKS R*evolution® Integrated Remote Plasma Source for On-Wafer Processing
Part Number: AX7690
SmartPower™ AX2500 Series Microwave Power Generator - MKS SmartPower™ AX2500 Series Microwave Power Generator
Part Number: AX2500
VI-Probe-350 V/I Probe RF Impedance Analyser - MKS VI-Probe-350 V/I Probe RF Impedance Analyser
Part Number: VI-Probe-350
VI-Probe-4100 V/I Probe RF Impedance Analyser - MKS VI-Probe-4100 V/I Probe RF Impedance Analyser
Part Number: VI-Probe-4100
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