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RF Power Generators

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  • Showing 1 - 16 of 16 items
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NOVA® Series 2 MHz 2500 Watt Mid-Frequency RF Plasma Generator - MKS NOVA® Series 2 MHz 2500 Watt Mid-Frequency RF Plasma Generator
Part Number: Nova 25A
NOVA® Series 2 MHz 5000 Watt Mid-Frequency RF Plasma Generator - MKS NOVA® Series 2 MHz 5000 Watt Mid-Frequency RF Plasma Generator
Part Number: Nova 50A
Spectrum® 11002 2MHz, 11.0kW RF Generator - MKS Spectrum® 11002 2MHz, 11.0kW RF Generator
Part Number: Spectrum
Spectrum® 5002 2MHz, 5.0kW RF Generator
ACG-10B 1000W Air-Cooled RF Plasma Generator - MKS ACG-10B 1000W Air-Cooled RF Plasma Generator
Part Number: ACG-10B-01
ACG-3B 300W Air-Cooled RF Plasma Generator - MKS ACG-3B 300W Air-Cooled RF Plasma Generator
Part Number: ACG-3B-01
ACG-6B 600W Air-Cooled RF Plasma Generator - MKS ACG-6B 600W Air-Cooled RF Plasma Generator
Part Number: ACG-6B-01
GHW Series 13.56 MHz 1.2kW High-Reliability RF Plasma Generator, 208 VAC - MKS GHW Series 13.56 MHz 1.2kW High-Reliability RF Plasma Generator, 208 VAC
Part Number: GHW12A
GHW Series 13.56 MHz 1.2kW High-Reliability RF Plasma Generator, 400/480 VAC - MKS GHW Series 13.56 MHz 1.2kW High-Reliability RF Plasma Generator, 400/480 VAC
Part Number: GHW12Z
GHW Series 13.56 MHz 2.5kW High-Reliability RF Plasma Generator, 208 VAC - MKS GHW Series 13.56 MHz 2.5kW High-Reliability RF Plasma Generator, 208 VAC
Part Number: GHW25A
GHW Series 13.56 MHz 5.0kW High-Reliability RF Plasma Generator, 208 VAC - MKS GHW Series 13.56 MHz 5.0kW High-Reliability RF Plasma Generator, 208 VAC
Part Number: GHW50A
GHW Series 13.56 MHz 5.0kW High-Reliability RF Plasma Generator, 400/480 VAC - MKS GHW Series 13.56 MHz 5.0kW High-Reliability RF Plasma Generator, 400/480 VAC
Part Number: GHW50Z
Spectrum® 1513 1.5kW RF Plasma Generator - MKS Spectrum® 1513 1.5kW RF Plasma Generator
Part Number: Spectrum 1513
Spectrum® 3013 3kW RF Plasma Generator - MKS Spectrum® 3013 3kW RF Plasma Generator
Part Number: Spectrum 3013
SurePower® 10.5kW 13.56 MHz RF Plasma Generator - MKS SurePower® 10.5kW 13.56 MHz RF Plasma Generator
Part Number: QL13013
SurePower® 13kW 13.56 MHz RF Plasma Generator
SurePower® 3.5kW 13.56 MHz RF Plasma Generator - MKS SurePower® 3.5kW 13.56 MHz RF Plasma Generator
Part Number: QL3513
SurePower® 6.5kW 13.56 MHz RF Plasma Generator - MKS SurePower® 6.5kW 13.56 MHz RF Plasma Generator
Part Number: QL6513
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