Spectrum® 1513 1.5kW RF Plasma Generator
Part Number: Spectrum 1513Product Details
Overview
Spectrum® generators feature high power density, excellent stability, generous power margins and high reliability for lower cost of ownership and improved yield, wafer-to-wafer and run-to-run. The Spectrum RF generator is available in power levels of 3.0 and 1.5kW at 13.56MHz.
The Spectrum RF Plasma Generator is used in Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, optical media and industrial coatings.
Features
High Repeatability for Consistent Process Performance
• Forward Power Accuracy of ±1.0% of set point, tied to and transferrable from NIST
• 500µsec response to power set point changes and process step transitions for improved uniformity
Smaller Footprint Reduces Required Tool Space
• Power density increased 2-3 times over previous models
• Integrated auto frequency tuning eliminates the need for a complex matching network
High Reliability Increases Uptime and Lowers CoO
• Improved thermal management and decreased power disipation through the use of new, high efficiency power amplifier (PA)
• Push-pull resonant circuit topology lowers the voltages across the power transistors
• Ample power margin allows more forward power delivery and more strike voltage potential to bridge sub-optimal conditions with no process interruption
Specifications
| Part Number: |
Spectrum 1513 |
| Auto Frequency Tuning (bandwidth) |
±5% |
| Compliance |
CE to EMC 89/336/EEC and LVD 72/23/EEC; SEMI F-47; NRTL Listed |
| Dynamic Power Range |
30W-1500W |
| Facility Requirements |
Primary AC Power Source - 200/208 VAC ±10% 3 Phase
Rated Current - 20A
Circuit Breaker - 25A
Ambient Temperature - +5°C to +35°C, non condensing
Cooling Water (minimum) - 1.5 gpm (5.7 lpm) |
| Frequency, Center (MHz) |
13.56 ±0.05% |
| Generator Dimensions |
(H × W × D)² - 133mm × 208mm × 444mm (5.25" × 8.2" × 17.5")
U - 3 U, Half Rack |
| Generator Weight (maximum) |
17kg (38lbs) |
| Interface |
Standard - RS232, subminiature 9-pin Type DB9F; Versatile Monitor Interface
Optional - External: 25 pin Analog, or DeviceNet™ or Profibus®
Dimensions (H × W × D) - 36mm × 142mm × 94mm (1.4" × 5.6" × 3.7")
Weight - 1.1kg (0.5 lbs) |
| Load Impedance |
Range Unlimited |
| Load Regulation (worst phase forward power; W, nominal) |
into 1.1 to 1 VSWR - 1500
into 1.5 to 1 VSWR - 1500
into 2.0 to 1 VSWR - 1500
into 3.0 to 1 VSWR - 1500
into 8 to 1 VSWR - 600 |
| Load Transient Recovery |
Forward power shuts down in approximately 5 microseconds if reverse power exceeds preset threshold (normally twice the steady-state reverse limit). Recovery period is adjustable from 200 microseconds (default) to 1.2 miliseconds |
| Power Control Accuracy¹ |
±1% of SetPoint - >300W
±1% of Full Scale - <300W |
| RF Output Connector³ Type QC Flange |
HN |
| RF Stability |
Spurious Output - Unconditionally stable for any load within operational limits <50dBc into 50 ohm load
Harmonic Output/Distortion - < 40dBc, Maximum (50 ohm load) |
| Software Pulsing Parameters |
Frequency - 0-1kHz
Minimum Pulse Width - 500µsec
RF Rise/Fall Time - 150µsec |